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Scanning electron microscope images of the etch profile. | Download ...
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Effect of the etch pressure on the etch profile and sidewall damage ...
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SEM picture of etch profile at high etch pressure of 160 mT…
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Schematics of an etch profile in (a) an anisotropic and (b)

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a) 80 min etch time: feature size effect dominates over microloading ...
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5 Etch profile of the unmasked region of a polymeric layer: (a) perfect ...
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Experimental profile and simulated etch profile e…

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